PLAUX-PM/R-5L

控制系统
Control system

控制方式
Control mode

全自动控制（自动/手动切换）
Full-automatic control (automatic/manual switching)

PLC

操作系统
Operating system

Windows 10

触摸屏
Touch screen

7寸
7 inches

整机规格
Specifications of the complete machine

尺寸
Size

W510×D400×H258mm

腔体
Cavity

尺寸
Size

W140*D200*H110mm

材质
Materials

316不绣钢（标配）/铝合金（可选）
316# stainless steel (standard)/aluminum alloy (optional)

电极
Electrode

尺寸
Size

W80×D160mm

层数
No. of Layers

1-2层，可选
1-2 layers, optional

托架
Bracket

材质
Materials

需定制
Customized

层数
No. of Layers

1层
1 layer

真空计
Vacuum gauge

皮拉尼式真空计
Pirani type vacuum gauge

1个
1 pc.

流量计
Flowmeter

MFC+浮子流量计
MFC+Float flowmeter

1路MFC，1路浮子流量计；Ar、N₂、O₂（可选）
One-way MFC, one-way float flowmeter; Ar, N₂, O₂ (optional)

真空泵
Vacuum pump

机械油式旋片泵
Mechanical oil type rotary vane pump

1套
1 set

发生器
Generator

中频/射频
IF/RF

40KHz，0〜500W

13.56MHz，0-150W

额定功率
Rated power

整机峰值功率
Peak power of the complete machine

2KW

机台供电
Power supply for machine

单相三线式
Single-phase three-wire type

AC-220V

选购品
Shopping products

干式泵、气浴电极（打孔）、托架、接枝气化仪、防腐密封、腔体加热，加热盘、温度传感器、H₂安全阀、慢速泄气阀、慢速抽气阀、钢瓶减压阀、水冷电极、冰水机、模温机、非标法兰、陶瓷紧固件
Dry pump, gas bath electrode (punching), bracket, grafting gasifier, anti-corrosive sealing ring, cavity heating, heating plate, temperature sensor, H₂ safety valve, slow air release valve, slow suction valve, cylinder pressure relief valve, water-cooling electrode, water chiller, die heater, non-standard flange, and ceramic fasteners