Plasma Surface Treatment for Advanced Packaging in AI Servers

2026-06-11

The rapid growth of AI servers has significantly increased the demand for advanced semiconductor packaging technologies such as CoWoS, Chiplet, 2.5D packaging, and HBM integration.


During advanced packaging processes, contaminants, oxide layers, and microscopic particles may remain on wafer and substrate surfaces. These contaminants can negatively affect bonding quality, underfill adhesion, and long-term package reliability.


Plasma surface treatment effectively removes organic residues and activates material surfaces, resulting in:


 Improved surface energy

 Enhanced bonding strength

 Better underfill adhesion

 Reduced void formation

 Improved package reliability


Typical applications include:


 CoWoS Packaging

 HBM Integration

 Wafer-Level Packaging

 Fan-Out Packaging

 Chiplet Assembly


PLAUX Plasma System provides advanced plasma treatment solutions for semiconductor and AI packaging industries.

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