Vacuum Plasma Coating

Description of vacuum plasma coating

Equipment Name: Plasma Processing Equipment

Equipment Model:PR90L

Machine weight: about 450KG

Rated power: 4.5KW

vacuum plasma coating power supply: AC-380V/three-phase five-wire

Overall specifications: 1030mm (W) × 920mm (D) × 1720mm (H)

Vacuum chamber specifications: 450mm (W) × 450mm (D) × 450mm (H) can be customized according to the product

Electrode plate size: 490mm(W)×320mm(D), 9 layers of horizontal electrodes, processing 8 layers, any combination

Loading method: screen tray

Capacity of vacuum plasma coating: According to product specifications

Processing time: different process, different processing time

Plasma generator power: RF 13.56MH z, 0-500W adjustable

Vacuum pump system: mechanical oil rotary vane vacuum pump

Vacuum Measurement System: Pirani Vacuum Gauge

Working vacuum degree: 20-60Pa

Vacuum pump limit pressure: 4.0×10-1Pa

Vacuum time: ≤100S

Breaking vacuum time: ≤60S

Gas supply method: solenoid valve type

Breaking Vacuum System: Customized Dedicated GDQ (Insufficient Indoor Air)

Flowmeter adjustment range: 0-500Sccm (ml/min)

Filter return system: automatic oil return device

Operation method: manually take and place the workpiece, start automatic control with a key

Application of vacuum plasma coating:

for different combinations of different manufacturing process, can be used in the device, a metal base piece, ceramics, glass and other surface cleaning work, modification and the like.

Company of vacuum plasma coating:

Package of vacuum plasma coating: